The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

2:30 PM - 2:45 PM

△ [15p-A408-7] Irradiation effect of soft X-ray to DLC films

〇(M1)Tomohiro Mishima1, Kyoji Morita1, Koji Nakanishi1, Kazuhiro Kanda1, Hiroki Akasaka2 (1.LASTI, Univ. Hyogo, 2.Tokyo Inst. Tech.)

Keywords:Diamond-like carbon