4:45 PM - 5:00 PM
[15p-A502-14] Deep etching of SOI substrate and chip bonding
Keywords:chip bonding, silicon on insulator, etch
Oral presentation
3 Optics and Photonics » 3.14 Silicon photonics and integrated photonics (formerly 3.15)
Wed. Mar 15, 2023 1:10 PM - 6:00 PM A502 (Building No. 6)
Shota Kita(NTT), Tomohiro Kita(Waseda Univ.), Taichiro Fukui(Univ. of Tokyo)
4:45 PM - 5:00 PM
Keywords:chip bonding, silicon on insulator, etch