[15p-B309-1~19] 8.1 Plasma production and diagnostics

△ [15p-B309-12] Measurement of atomic nitrogen density in a miniature ECR nitrogen plasma by VUV absorption spectroscopy –toward estimati on of adsorption probability of reactive nitrogen species–

〇(M1)Shogo Uebayashi¹, Koichi Sasaki¹, Lu Bang², Satoru Takakusagi², Kiyotaka Asakura² (1.School of Eng,Hokkaido Univ., 2.Institute for Catalysis,Hokkaido Univ.)

Keywords:small ECR nitrogen plasma, nitrogen atom density, Catalysis

The absolute value of nitrogen atom density in small ECR nitrogen plasma was measured by vacuum ultraviolet absorption spectroscopy. When the same conditions were measured again from a lower flow rate, the nitrogen atom density was observed to be higher than that measured while decreasing the flow rate, and returned to the original value above a certain amount. This suggests that the loss probability of nitrogen atoms on the surface of the stainless steel vacuum vessel has a history of change.