【Highlighted Presentation】Real-Time and Atomic-Scale Observation of Solid-Phase Crystallization in Thin Silicon Film using <em>in situ</em> Heating High-Resolution TEM

Manabu Tezura; Takanori Asano; Riichiro Takaishi; Mitsuhiro Tomita; Masumi Saitoh; Hiroki Tanaka

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)

3:30 PM - 3:45 PM

△ [15p-B410-9] 【Highlighted Presentation】Real-Time and Atomic-Scale Observation of Solid-Phase Crystallization in Thin Silicon Film using in situ Heating High-Resolution TEM

〇Manabu Tezura¹, Takanori Asano¹, Riichiro Takaishi¹, Mitsuhiro Tomita¹, Masumi Saitoh¹, Hiroki Tanaka¹ (1.Institute of Memory Technology R&D, Kioxia Corp.)

Keywords:solid phase crystallization, atomistic structural dynamics, formation of defects