The 70th JSAP Spring Meeting 2023

Fumito Imura

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Chairperson, etc.

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)