Formation of SiO<sub>2</sub> Layer on SiGe/Si Nano-structures using Plasma-enhanced Atomic Layer Deposition

Presentation information

Poster presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA06 (Poster)

4:00 PM - 6:00 PM

〇JIALUN CAI¹, NORIYUKI TAOKA¹, KATSUNORI MAKIHARA¹, AKIO OHTA¹, SEIICHI MIYAZAKI¹ (1.Nagoya Univ.)

Keywords:IV group semiconductor