[15p-PA06-1~4] 15.5 IV族結晶，IV-IV族混晶

▲ [15p-PA06-2] Formation of SiO₂ Layer on SiGe/Si Nano-structures using Plasma-enhanced Atomic Layer Deposition

〇JIALUN CAI¹、NORIYUKI TAOKA¹、KATSUNORI MAKIHARA¹、AKIO OHTA¹、SEIICHI MIYAZAKI¹ (1.Nagoya Univ.)

キーワード：IV group semiconductor