The 70th JSAP Spring Meeting 2023

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[16a-A402-1~6] 8.1 Plasma production and diagnostics

Thu. Mar 16, 2023 9:15 AM - 10:45 AM A402 (Building No. 6)

Keigo Takeda(Meijo Univ.)

9:45 AM - 10:00 AM

[16a-A402-3] Effect of antenna design of curling probe utilized for material processing plasma on a reflected spectrum

〇(M1)Shota Kato1, Keiji Nakamura1, Daisuke Ogawa1 (1.Chubu Univ.)

Keywords:Curling Probe, Electron Density, simulation