Shota Kato

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:15 AM - 10:45 AM A402 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[16a-A402-1~6] 8.1 Plasma production and diagnostics

9:45 AM - 10:00 AM

[16a-A402-3] Effect of antenna design of curling probe utilized for material processing plasma on a reflected spectrum

〇(M1)Shota Kato¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)