[16a-A408-1~10] 6.2 Carbon-based thin films

▲ [16a-A408-4] Application of nanosecond laser annealing to diamond materials

〇Abdelrahman Zkria Ahmed¹, Eslam Abubakr¹, Tsuyoshi Yoshitake¹ (1.Kyushu Univ.)

Keywords:diamond materials, Laser annealing, amorphous carbon

Recently, the influence of pulsed laser irradiation on diamond materials, including single/poly/nanocrystalline diamond, and diamond-like materials (DLC) received much attention. In this work, the ArF laser irradiation is employed in the amorphous carbon (a-C) films, and the microstructure variations of the as-deposited and annealed films have been investigated by Raman spectroscopy and scanning electron microscopy. In addition, laser-induced doping has been applied to other wide band gap semiconductors (ex, SiC) and its effectivity is experimentally proved. In this work, we applied laser-induced doping to singlecrystalline diamond, and the doping by phosphorus and Boron is discussed from the chemical compositionally and electrical viewpoints.