12:00 PM - 12:15 PM
△ [16a-D519-12] Atomic layer Etching of metal films by neutral cluster beam and VUV light irradiations
Keywords:Atomic Layer Etching, neutral gas cluster beam
Presentation information
Oral presentation
CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.4 &7.5
[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5
Thu. Mar 16, 2023 9:00 AM - 12:45 PM D519 (Building No. 11)
Kousuke Moritani(兵庫県立大), Katsumi Takahiro(Kyoto Inst. Tech.)