Oral presentation
[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5
Thu. Mar 16, 2023 9:00 AM - 12:45 PM D519 (Building No. 11)
Kousuke Moritani(兵庫県立大), Katsumi Takahiro(Kyoto Inst. Tech.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Taiki Fujita1,2, Shin-ichiro Sato2, Manato Deki3, Hirotaka Watanabe4, Shugo Nitta4, Yoshio Honda4, Hiroshi Amano3,4, Hidetsugu Tsuchida1 (1.Kyoto Univ., 2.QST, 3.Nagoya Univ. VBL, 4.Nagoya Univ. IMaSS)
9:15 AM - 9:30 AM
〇Mayuto Uchida1, Masayoshi Ichimiya2, Takahiko Ban2, Junichi Yanagisawa2 (1.Grad. Sch. of Univ. of Shiga Pref., 2.Univ. of Shiga Pref.)
9:30 AM - 9:45 AM
〇(M1)Kengo Watanabe1, Yuta Odani1, Katsumi Takahiro1 (1.Kyoto Inst. Tech.)
9:45 AM - 10:00 AM
〇(DC)Hitomi Mizutani1, Shunya Yamamoto2, Katsumi Takahiro1 (1.Kyoto Inst. Tech., 2.QST Takasaki)
10:00 AM - 10:15 AM
〇(B)Keita Nishihata1, Hitomi Mizutani1, Katsumi Takahiro1 (1.Kyoto Inst. Tech.)
10:15 AM - 10:30 AM
〇Bun Tsuchiya1, Taku Kodera1, Kohtaku Suzuki2, Tomoko Sasaki3 (1.Meijo Univ., 2.Wakasa-w Ene. Res., 3.Tohoku Univ.)
10:30 AM - 10:45 AM
〇Ryohei Takahashi1, Yuya Kazamatsuri1, Tomoaki Seki1, Yujin Takayama2, Nana Sugimoto2, Kenji Motohashi1,2 (1.Toyo Univ. Grad. Sch. Sci. Eng., 2.Toyo Univ. Sci. Eng.)
11:00 AM - 11:15 AM
〇Satoshi Ninomiya1, Seinosuke Tsuneki1, Lee Chuin Chen1, Kenzo Hiraoka1 (1.Univ. of Yamanashi)
11:15 AM - 11:30 AM
Taisei Toku1, 〇Kousuke Moritani1, Norio Inui1 (1.Univ. of Hyogo)
11:30 AM - 11:45 AM
〇(B)Moeki Sugimoto1, Toshio Seki2, Jiro Matsuo2 (1.Faculty of Engineering, Kyoto Univ., 2.Graduate School of Engineering, Kyoto Univ.)
11:45 AM - 12:00 PM
〇Kohdai Sakuta1, Masaya Takeuchi1, Noriaki Toyoda1 (1.Hyogo Univ.)
12:00 PM - 12:15 PM
△ [16a-D519-12] Atomic layer Etching of metal films by neutral cluster beam and VUV light irradiations
〇Hideyuki Tanaka1, Masaya Takeuchi1, Noriaki Toyoda1 (1.Univ Hyogo)
12:15 PM - 12:30 PM
〇Masaya Takeuchi1, Reki Fujiwara1, Taisei Yamashita1, Noriaki Toyoda1 (1.Univ. of Hyogo)
12:30 PM - 12:45 PM
〇Dai Yamazaki1, Mari Mizusawa2, Atsushi Moriai1, Masayasu Takeda1, Hideaki Matsue1, Kenji Sakurai3 (1.JAEA, 2.CROSS, 3.NIMS)