Masaya Takeuchi

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 12:45 PM D519 (Building No. 11)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.4 &7.5

[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

12:15 PM - 12:30 PM

[16a-D519-13] Reaction mechanism of atomic layer etching process of SiNx film using O₂-GCIB and acetylacetone

〇Masaya Takeuchi¹, Reki Fujiwara¹, Taisei Yamashita¹, Noriaki Toyoda¹ (1.Univ. of Hyogo)