[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

[16a-D519-8] Sputtering Properties Produced by Droplet Ions with Different Sizes and Electric Charges

〇Satoshi Ninomiya¹, Seinosuke Tsuneki¹, Lee Chuin Chen¹, Kenzo Hiraoka¹ (1.Univ. of Yamanashi)

Keywords:electrospray, ion beam, droplet ion

We have been studying a vacuum electrospray droplet ion (V-EDI) beams produced by electrospray of aqueous solutions under vacuum. In this study, the effects of capillary inner diameter and electrospray voltage on size distribution of the droplet ions and the sputtering properties for polymers were investigated.