[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

[16a-D519-9] Evaluation of internal energy of Benzylpyridinium molecules sputtered by Ar cluster ions

Taisei Toku¹, 〇Kousuke Moritani¹, Norio Inui¹ (1.Univ. of Hyogo)

Keywords:TOF-SIMS, GCIB, Sputtering

To understand the mechanism of organic molecule desorption by an Ar gas cluster ion beam (Ar-GCIB) irradiation, size-selected Ar-GCIB was irradiated on benzyl pyridinium thin film samples with two different film thicknesses, and SIMS spectra were measured. The internal energy of the sputtered molecular ions was evaluated from the intensity ratio of molecular and dissociated ions in the mass spectra. The results suggest that the hardness of the sample affects the increase of the internal energy and, thus, molecular dissociation and desorption.