3:00 PM - 3:15 PM
[16p-D519-3] In-situ observation technique of micro-modification patterns under particle beam writing by Ion Beam Induced luminescence (IBIL) analysis and imaging
Keywords:Proton/Particle Beam Writing, Ion Beam Induced Luminescence
Proton/Particle Beam Writing (PBW) technology is a unique microfabrication technology using quantum
beams, which has high selectivity for processing objects and is capable of processing with a high aspect
ratio. So far, it has been applied to the microfabrication of polymer materials and wide bandgap
semiconductor materials. Expanding the PBW technology requires expanding the target materials and
quickly understanding the irradiation conditions. But with the conventional ion beam analysis technology, it
was difficult to grasp the amount of change non-destructively. On the other hand, in this study, we focused
on ion beam-induced luminescence (IBIL) and accomplished utilizing IBIL spectroscopic analysis and
imaging simultaneously with the microfabrication of PBW to visualize the irradiation effect occurring in
the target area.
beams, which has high selectivity for processing objects and is capable of processing with a high aspect
ratio. So far, it has been applied to the microfabrication of polymer materials and wide bandgap
semiconductor materials. Expanding the PBW technology requires expanding the target materials and
quickly understanding the irradiation conditions. But with the conventional ion beam analysis technology, it
was difficult to grasp the amount of change non-destructively. On the other hand, in this study, we focused
on ion beam-induced luminescence (IBIL) and accomplished utilizing IBIL spectroscopic analysis and
imaging simultaneously with the microfabrication of PBW to visualize the irradiation effect occurring in
the target area.