[16p-A302-1~8] Advanced Surface and Interface Technologies for Micro and Nanoscale Fabrication

[16p-A302-2] Mechanical Metamaterial Energy Harvesting Using 3D Photolithography

〇Takaaki Suzuki¹ (1.Gunma Univ.)

Keywords:energy harvesting, mechanical metamaterial, photolithography

We propose three-dimensional photolithography as a method to approach the blank area between the micrometer order and the millimeter order in the conventional processing technology, and apply the technology to polymer MEMS field. In this presentation, we introduce (1) the 3D photolithography, (2) mechanical metamaterial structures fabricated using the 3D photolithography, and (3) application to a piezoelectric polymer vibration type and a triboelectrification type energy harvesters with embedded mechanical metamaterials.