Symposium (Oral)
[16p-A302-1~8] Advanced Surface and Interface Technologies for Micro and Nanoscale Fabrication
Thu. Mar 16, 2023 1:30 PM - 6:25 PM A302 (Building No. 6)
Shutaro Asanuma(AIST), Hayato Sone(Gunma University)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 2:05 PM
〇Yohio Mita1 (1.Univ. of Tokyo)
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2:05 PM - 2:40 PM
〇Takaaki Suzuki1 (1.Gunma Univ.)
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2:40 PM - 3:15 PM
〇Hiroshi Toshiyoshi1 (1.IIS, Univ. of Tokyo)
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3:15 PM - 3:50 PM
〇Agnes Tixier-Mita1, Satoshi Ihida1, Toshiyoshi Hiroshi1 (1.Univ. Tokyo)
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4:05 PM - 4:40 PM
〇Takeo Watanabe1, Tetsuo Harada1, Shinji Yamakawa1 (1.Univ. of Hyogo)
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4:40 PM - 5:15 PM
〇Keita Sakai1 (1.Canon Inc.)
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5:15 PM - 5:50 PM
〇Koji Asakawa1 (1.Kioxia)
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5:50 PM - 6:25 PM
[16p-A302-8] 3D Heterogenous Channel Integration Technology for CFET Performance Balance Engineering
〇Wen Hsin Chang1, X. R. Yu2,3, T. C. Hong2,4, Y. J. Lee2,4, T. S. Chao4, Y. H. Wang3, T. Maeda1 (1.AIST, 2.TSRI, 3.NCKU, 4.NYCU)
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