The 70th JSAP Spring Meeting 2023

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Kazuhiko Endo(Tohoku Univ.), Kimihiko Kato(AIST)

1:00 PM - 1:15 PM

[16p-A403-1] The 14th Silicon Technology Division Paper Award / Young Researcher Award Ceremony

〇Kazuhiko Endo1,2 (1.Chief Secretary of Silicon Technology Division, 2.Tohoku Univ.)

Keywords:silicon technology