4:00 PM - 4:15 PM
[16p-A403-10] Influence of annealing temperature on electrical properties of TiOx-based ReRAM
Keywords:ReRAM, Anneal, Ti
Presentation information
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)
Kazuhiko Endo(Tohoku Univ.), Kimihiko Kato(AIST)