[16p-A408-1~18] 6.2 Carbon-based thin films

△ [16p-A408-4] High-Density NV ensemble produced by Electron Irradiation of Ultra High-Concentration Nitrogen-doped CVD Diamond

〇Yudai Asano¹, Kyosuke Hayasaka¹, Mayu Ueda¹, Kosuke Kimura², Kyotaro Kanehisa¹, Taisuke Kageura^1,3, Takeshi Tanii¹, Shinobu Onoda², Shinpei Enomoto⁴, Shozo Kono⁴, Hiroshi Kawarada^1,4 (1.Waseda Univ., 2.QST, 3.NIMS, 4.ZAIKEN)

Keywords:NV center, diamond

NV ensembles in diamond have potential applications in magnetic sensing. Magnetic sensitivity is proportional to the square root of NT2, depending on the number N of NV centers contributing to sensing and the coherence time T2. In other words, magnetic sensitivity can be improved by fabricating highly concentrated NV centers while maintaining a long T2. Therefore, we attempted to increase the concentration of NV ensembles by preparing highly concentrated nitrogen-doped diamond thin films by CVD and then introducing vacancies by local electron irradiation using TEM.