Quasi-shear mode excitation of c-axis tilted MgZnO and ScAlN epitaxial thin films on off-angle sapphire single crystal substrates

Shiori Kobayashi; Hiroki Kishi; Takahiko Yanagitani

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[16p-A409-1~17] 6.1 Ferroelectric thin films

Thu. Mar 16, 2023 2:00 PM - 6:30 PM A409 (Building No. 6)

Isaku Kanno(Kobe Univ.), Takeshi Yoshimura(Osaka Metro. Univ.), Shintaro Yasui(Tokyo Tech), Shinya Yoshida(Shibaura Institute of Technology)

5:30 PM - 5:45 PM

△ [16p-A409-14] Quasi-shear mode excitation of c-axis tilted MgZnO and ScAlN epitaxial thin films on off-angle sapphire single crystal substrates

〇Shiori Kobayashi^1,2, Hiroki Kishi^1,2, Takahiko Yanagitani^1,2,3,4,5 (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST, 5.JST-START)

Keywords:piezoelectric thin film, epitaxial, ScAlN

In this study, (111) Pt was epitaxial grown on a c-plane sapphire substrate with 10° and 20° off angles in the a-plane direction using a parallel plate PF magnetron sputtering device, and ScAlN and MgZnO thin films were epitaxial grown on it. Also, k'35 was estimated using the conversion loss method.