The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[16p-A409-1~17] 6.1 Ferroelectric thin films

Thu. Mar 16, 2023 2:00 PM - 6:30 PM A409 (Building No. 6)

Isaku Kanno(Kobe Univ.), Takeshi Yoshimura(Osaka Metro. Univ.), Shintaro Yasui(Tokyo Tech), Shinya Yoshida(Shibaura Institute of Technology)

6:00 PM - 6:15 PM

[16p-A409-16] Characteristics of BAW resonators with YbGaN and YbAlN epitaxial thin films

〇Zitai Feng1,2, Song Li1,2, Junjun Jia1, Takahiko Yanagitani1,2,3,4,5 (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST, 5.JST-START)

Keywords:YbAlN, YbGaN, epitaxial growth