[16p-A409-1~17] 6.1 Ferroelectric thin films

△ [16p-A409-17] Acoustic separation of piezoelectric layer and substrate by using 30-layer polarization inversion resonator

〇Kazutaka Shiraiwa^1,2, Takahiko Yanagitani^1,2,3,4,5 (1.Waseda Univ., 2.Zaiken, 3.JST-CREST, 4.JST-FOREST, 5.JST-START)

Keywords:polarization inversion resonator, ScAlN, piezoelectric thin film

HBAR has a structure in which a piezoelectric thin film is deposited on a substrate. However, in HBAR, the piezoelectric layer and the substrate cannot be separated acoustically, and the substrate and the piezoelectric body resonate multiple times, causing multiple resonances. In this study, we fabricated a 30 layer polarization inverted multilayer film and a single layer piezoelectric thin film resonator with a substrate (HBAR) for the purpose of acoustic separation between the substrate and the piezoelectric layer, and compared them using a network analyzer.