Study of pattern of PZT Actuator for actuating the spiral structure

Yasuyuki Yamamoto; Sohei Matsumoto; Tomoko Yamamoto; Yuki Okamoto; Masaaki Ichiki; Takeshi Kobayashi

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[16p-A409-1~17] 6.1 Ferroelectric thin films

Thu. Mar 16, 2023 2:00 PM - 6:30 PM A409 (Building No. 6)

Isaku Kanno(Kobe Univ.), Takeshi Yoshimura(Osaka Metro. Univ.), Shintaro Yasui(Tokyo Tech), Shinya Yoshida(Shibaura Institute of Technology)

4:15 PM - 4:30 PM

[16p-A409-9] Study of pattern of PZT Actuator for actuating the spiral structure

〇Yasuyuki Yamamoto¹, Sohei Matsumoto¹, Tomoko Yamamoto¹, Yuki Okamoto¹, Masaaki Ichiki¹, Takeshi Kobayashi¹ (1.AIST)

Keywords:PZT thin film, Archimedes' spiral

A viscosity sensor using a PZT thin film as an actuator are developed. An Archimedes' spiral was applied for the vibrator as the shape most suitable for viscosity measurement. In order to displace the spiral shape perpendicularly to the chip surface, the PZT thin film actuator must have a special shape. In the presentation, we will report the design and experimental results.