[16p-A502-1~14] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

△ [16p-A502-6] Measurement of the out-of-plane motion in MEMS devices using differential interference contrast microscopy with phase-shifting corrections

〇Mirai Iimori¹, Ya Zhang¹ (1.Tokyo Univ. of Agri. &Techno.)

Keywords:MEMS, resonator, differential interference contrast microscopy

We have developed a stroboscopic differential interference (DIC) microscope to study the resonance characteristics of microelectromechanical system (MEMS) resonators, which can observe the 2-dimenstional, out-of-plane motions by measuring light intensity changes at the sample surface. However, it is difficult to accurately measure the deflection of the vibrating surface because the light intensity change is greatly affected by the surface conditions of the MEMS resonator. In this study, we report a method for measuring the vibrating surface deflection of MEMS resonator using stroboscopic DIC microscope with phase-shifting corrections.