Wet etching of polycrystalline gallium nitride using alkaline solution.

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B401 (Building No. 2)

Yoshio Honda(Nagoya Univ.), Hisashi Murakami(TUAT), Atsushi Yamaguchi(Kanazawa Inst. of Tech.)

5:30 PM - 5:45 PM

〇Daiki Takayama¹, Yukihiro Tsuji¹, Ken Nakata¹, Kozo Makiyama¹ (1.SEI, Ltd)

Keywords:gallium nitride, TMAH