The 70th JSAP Spring Meeting 2023

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Noriyuki Taoka(Nagoya Univ.), Yoshiki Yamamoto(Renesas Electronics)

2:30 PM - 2:45 PM

[16p-B508-6] Frequency dependence of wakeup characteristics in 3.6-nm-thick ultrathin Hf0.5Zr0.5O2 ferroelectrics

〇Makoto Kawano1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1 (1.Univ. Tokyo, Faculty of Engineering)

Keywords:ferroelectrics