2:45 PM - 3:00 PM
[16p-D215-6] Investigation of fabrication methods of large-area superconducting quantum circuits using an ArF immersion lithography system
Keywords:Superconducting circuits
The race to develop methods for fabricating large-scale superconducting quantum circuits has begun all over the world, recently. We have started to develop a method for fabricating large-scale quantum circuits on 12-inch silicon wafers using an ArF immersion lithography system within Japanese National R&D fund program. We will explain the progress of this development.