Satoru Odate

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 6:00 PM D215 (Building No. 11)

Oral presentation
| 11 Superconductivity
| 11.5 Junction and circuit fabrication process, digital applications

[16p-D215-1~16] 11.5 Junction and circuit fabrication process, digital applications

2:45 PM - 3:00 PM

[16p-D215-6] Investigation of fabrication methods of large-area superconducting quantum circuits using an ArF immersion lithography system

〇Satoru Odate¹, Saito Naooki¹, Suzuki Kosuke¹, Aoyama Hajime¹, Tsukamoto Hiroyuki¹, Kusuyama Koichi², Nakamura Yasunobu^2,3 (1.Nikon Corp, 2.Riken, 3.U. of Tokyo)

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