The 70th JSAP Spring Meeting 2023

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[16p-D511-1~11] 15.5 Group IV crystals and alloys

Thu. Mar 16, 2023 1:30 PM - 4:15 PM D511 (Building No. 11)

Katsunori Makihara(Nagoya Univ.)

3:30 PM - 3:45 PM

[16p-D511-9] Effects of increased etching rate by using laser marker on fabrication of Ge-on-Insulator(111) structure

〇Miyu Takamatsu1, Yuya Wagatsuma1, Yuichi Sakurai1, Shion Sano1, Kentarou Sawano1 (1.Tokyo City Univ.)

Keywords:semiconductor