The 70th JSAP Spring Meeting 2023

Presentation information

Symposium (Oral)

Symposium » Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

Hiroyuki Akinaga(AIST), Masashi Aono(Amoeba Energy), Takumi Mikawa(SCREEN)