1:30 PM - 1:35 PM
[16p-E302-1] Opening "Semiconductor Giga Fab. Why now?"
Keywords:semiconductor, Giga Fab., Laboratory automation
Presentation information
Symposium (Oral)
Symposium » Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?
[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?
Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)
Hiroyuki Akinaga(AIST), Masashi Aono(Amoeba Energy), Takumi Mikawa(SCREEN)