The 70th JSAP Spring Meeting 2023

Sessions

Symposium » Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

Symposium (Oral)

[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

Hiroyuki Akinaga(AIST), Masashi Aono(Amoeba Energy), Takumi Mikawa(SCREEN)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

5:20 PM - 6:20 PM

Hiroyuki AKINAGA1, Takumi MIKAWA2, Masashi AONO3, Toshihide KOBAYASHI4, Yoichi MOTOORI5, Hideharu AMANO6, Taro HITOSUGI7, Hiroyuki FUJITA8, Koichi TAKAHASHI9, Shuji IKEDA10 (1.AIST, 2.SCREEN Semicond., 3.Amoeba Energy, 4.Sangyo Times, 5.Murata Machinery, 6.Keio Univ., 7.Univ. Tokyo, 8.TCU, 9.RIKEN, 10.tei solutions)

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