The 70th JSAP Spring Meeting 2023

Presentation information

Symposium (Oral)

Symposium » Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

Hiroyuki Akinaga(AIST), Masashi Aono(Amoeba Energy), Takumi Mikawa(SCREEN)

4:50 PM - 5:20 PM

[16p-E302-8] IoB brings drastic change on Semiconductor Manufacturing Technology

Shuji Ikeda1 (1.tei Solutions)

Keywords:Manufacturing Technology, IoB devices, Semiconductor Devices

Semiconductor business is growing continuously thanks to its amazing manufacturing technology. Now, the biological market is ready for explosion. Innovation of manufacturing technology for the biological devices is needed realizing high productivity. In coming IoB era, sensors, semiconductor devices and MEMS are implanted into human bodies. For this purpose, manufacturing technology should clear the special technical barriers, including flexibility, disposable, wettability, toxicity free, rejection free from the body, free from hacking, and others. These requirements are not yet much attention in standard semiconductor manufacturing. On the other hand, Rapidus is established as pure semiconductor chip foundry in Japan, focusing on 2nm generation and beyond. The combination of cutting-edge devices, Rapidus is focusing on, and biological devices is essential to meet huge bio-medical market demand. In this paper, manufacturing technology for biological devices is discussed. It is time to collaborate tool makers, material suppliers and process integrators to create innovative manufacturing technology.