The 70th JSAP Spring Meeting 2023

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Symposium (Oral)

Symposium » Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

Hiroyuki Akinaga(AIST), Masashi Aono(Amoeba Energy), Takumi Mikawa(SCREEN)

5:20 PM - 6:20 PM

[16p-E302-9] Panel discussion

〇Hiroyuki AKINAGA1, Takumi MIKAWA2, Masashi AONO3, Toshihide KOBAYASHI4, Yoichi MOTOORI5, Hideharu AMANO6, Taro HITOSUGI7, Hiroyuki FUJITA8, Koichi TAKAHASHI9, Shuji IKEDA10 (1.AIST, 2.SCREEN Semicond., 3.Amoeba Energy, 4.Sangyo Times, 5.Murata Machinery, 6.Keio Univ., 7.Univ. Tokyo, 8.TCU, 9.RIKEN, 10.tei solutions)

Keywords:semiconductor, Giga Fab., Laboratory automation