[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-6] MEMS Rogowski Coil Current Sensor with Radially Formed Spiral Return Coil

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Naoya Yamada¹, Kazuki Yoshida¹, Kenichi Yoshida², Kenichi Maehara², Makiko Noma², kazuyuki Sashida², Shoma Hoki², Katsuya Ikeda², Toshiyuki Takemori² (1.Yamagata Res. Inst. Tech., 2.Shindengen)

Keywords:MEMS, Rogowski coil, current sensor

We have fabricated a MEMS Rogowski coil current sensor with a radially formed TSV structure. A coil that rotates clockwise within the cross section of the substrate is formed, and a return coil that rotates counterclockwise from the terminal end is formed to simultaneously perform current detection and external magnetic field cancellation. In both evaluations with a constant di/dt of 10A/μs and varying the peak current up to 200A, and evaluations with a constant peak current of 200A and varying di/dt up to 50A/μs, it is proportional to the applied current. It was confirmed that the output was obtained.