[16p-PA04-1~24] 13.7 Compound and power devices, process technology and characterization

[16p-PA04-21] Evaluation of the Baliga figure of merit for ultra-wide bandgap oxide alloys

〇Yuichi Ota¹, Kentaro Kaneko², Takeyoshi Onuma³, Shizuo Fujita⁴ (1.TIRI, 2.Ritsumeikan Univ., 3.Kogakuin Univ., 4.Kyoto Univ.)

Keywords:Oxide semicondctor, Semiconductor alloys, Ultra-wide bandgap semiconductors