4:00 PM - 6:00 PM
▲ [16p-PA08-11] Pre-annealing effect on transport properties of γ-Al2O3/SrTiO3 heterostructure
Keywords:Oxide thin film, Heterostructure, Pulsed laser deposition
2DEG system at the cubic γ-Al2O3/SrTiO3 interface where the carriers are donated by oxygen vacancies has attracted attention because of its high carrier mobility. However, the heterostructures have been grown on substrates after annealing the SrTiO3 substrate in oxygen, which is known to generate Sr vacancies in the substrate surface layer. As the transport properties of SrTiO3 are very sensitive to lattice defects, such pre-annealing may affect the transport properties. Therefore, in this work, γ-Al2O3/SrTiO3 heterostructures are fabricated under moderate pre-annealing conditions and we investigate the transport properties of the heterostructures.