The 70th JSAP Spring Meeting 2023

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[16p-PA08-1~18] 6.3 Oxide electronics

Thu. Mar 16, 2023 4:00 PM - 6:00 PM PA08 (Poster)

4:00 PM - 6:00 PM

[16p-PA08-9] Epitaxial Growth of Meta-stable Hf0.5Zr0.5O2

〇(D)Yufan Shen1, Daisuke Kan1, Yuichi Shimakawa1 (1.Kyoto Univ. ICR)

Keywords:ferroelectric

Meta-stable oxides can be epitaxially stabilized via heterointerfaces. Recently, it was shown that the meta-stable orthorhombic fluorite oxide Hf0.5Zr0.5O2 (HZO) films were epitaxially grown on perovskite oxides. However, how the meta-stable structure of HZO can be stabilized on the perovskite oxides’ surfaces is still unclear. In this study, by pulsed laser deposition, we epitaxially grew HZO thin films on (100) SrTiO3 (STO) substrates, which were buffered by either La0.7Sr0.3MnO3 and LaMnO3, and investigated structural and ferroelectric properties of HZO films.