4:00 PM - 6:00 PM
▲ [16p-PA08-9] Epitaxial Growth of Meta-stable Hf0.5Zr0.5O2
Keywords:ferroelectric
Meta-stable oxides can be epitaxially stabilized via heterointerfaces. Recently, it was shown that the meta-stable orthorhombic fluorite oxide Hf0.5Zr0.5O2 (HZO) films were epitaxially grown on perovskite oxides. However, how the meta-stable structure of HZO can be stabilized on the perovskite oxides’ surfaces is still unclear. In this study, by pulsed laser deposition, we epitaxially grew HZO thin films on (100) SrTiO3 (STO) substrates, which were buffered by either La0.7Sr0.3MnO3 and LaMnO3, and investigated structural and ferroelectric properties of HZO films.