[16p-PA09-1~18] 6.4 Thin films and New materials

[16p-PA09-13] Annealing Effect for Mn-Doped ITO Films Prepared by RF Magnetron Sputtering

〇(M2C)Shintaro Takehisa¹, Ryoto Kawamura¹, Saiki Kitagawa¹, Toshihiro Nakamura^1,2 (1.Kyoto Univ., 2.ILAS, Kyoto Univ.)

Keywords:diluted magnetic semiconductor, transparent conductive film, annealing

In recent years, diluted magnetic semiconductors have attracted much attention as promising spintronics materials. In this study, we investigated the annealing effect for Mn-doped indium tin oxide thin films, which are one type of magnetic transparent conducting films. The annealing treatment resulted in an improvement in crystallinity, an increase in carrier density, a decrease in mobility, and an increase in band gap. In addition, the magnetic properties of the room-temperature-deposited samples revealed ferromagnetism at room temperature. We discuss the effect of the annealing treatment on the magnetic properties of the deposited films.