[16p-PA09-1~18] 6.4 Thin films and New materials

[16p-PA09-7] Optimization of oxygen partial pressure of room-temperature sputter-deposited B-doped In₂O₃ on PET substrate

〇Shun Mori¹, Kanta Kibishi¹, Shinri Yamadera¹, Ayumu Nodera¹, Kotaro Watanabe¹, Ichiro Takano¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:transparent conductive film, flexible, indium oxide