[16p-PA09-1~18] 6.4 Thin films and New materials

[16p-PA09-8] Improvement of IMT properties of VO2 films on polyimide by introducing ZnO nanorod buffer layer

〇(M1)Yukito Ozawa¹, Yuta Miyatake¹, Kunio Okimura¹ (1.Tokai Univ.)

Keywords:smart window, thin film, polyimide

Vanadium dioxide (VO2) is known as a phase transition material whose electrical and optical properties change at temperatures of around 68°C. In this study, flexible polyimide was employed as a substrate for the growth of VO2. In addition, two types of buffer layers, zinc oxide deposited by sputtering and nanorod zinc oxide deposited by hydrothermal synthesis, were employed to promote the crystal growth of VO2 crystals on polyimide, and their properties were compared.