10:45 AM - 11:00 AM
[17a-A502-5] Vibration detection of glass substrates with Mirau-type optical interferometer
Keywords:Vibration detection
Presentation information
Oral presentation
3 Optics and Photonics » 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)
[17a-A502-1~8] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)
Fri. Mar 17, 2023 9:30 AM - 11:45 AM A502 (Building No. 6)
Tatsutoshi Shioda(Saitama Univ.), Takashi Kato(UEC)