The 70th JSAP Spring Meeting 2023

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[17a-B401-1~9] 15.4 III-V-group nitride crystals

Fri. Mar 17, 2023 9:00 AM - 11:45 AM B401 (Building No. 2)

Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)

9:45 AM - 10:00 AM

[17a-B401-4] Characteristics of epitaxial ScAlN films grown by sputtering

〇Atsushi Kobayashi1, Takuya Maeda2, Yoshio Honda3, Kohei Ueno1, Hiroshi Fujioka1 (1.IIS, The Univ. of Tokyo, 2.EEIS, The Univ. of Tokyo, 3.Nagoya Univ.)

Keywords:ScAlN