[17a-D419-1~12] 6.4 Thin films and New materials

△ [17a-D419-7] Development of periodic metal nanoparticles pattern on polymer surfaces by thermal nanoimprinting and pulsed laser deposition techniques

〇Yuka Shimada¹, Yuto Maeda¹, Tomoaki Oga¹, Satoru kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1.Tokyo Tech, 2.KISTEC)

Keywords:nanoimprinting, pulsed laser deposition, periodic pattern

Fabrication of fine periodic patterns of metal nanoparticles on polymer sheet surfaces has potential applications in environments requiring flexibility, such as biomolecular observation and biosensor substrates. In this study, we investigated the formation of fine periodic patterns of metal nanoparticles on polyimide substrates by nanoimprinting using a micro self-assembling mold and by thin-film synthesis.