Precise evaluation of EUV illuminator irradiance considering luminance distribution of laser plasma light sources

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

Fri. Mar 17, 2023 9:00 AM - 12:30 PM E502 (Building No. 12)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Akio Yoneyama(SAGA Light Source), Masahiko Ishino(QST)

10:15 AM - 10:30 AM

〇Shuntarou Waki¹, Yusuke Tsukui¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

Keywords:EUV, EUV microscopy