Shuntarou Waki

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 12:30 PM E502 (Building No. 12)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[17a-E502-1~13] 7.1 X-ray technologies

10:15 AM - 10:30 AM

[17a-E502-6] Precise evaluation of EUV illuminator irradiance considering luminance distribution of laser plasma light sources

〇Shuntarou Waki¹, Yusuke Tsukui¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)