[17a-PA01-1~7] 7 Beam Technology and Nanofabrication (Poster)

[17a-PA01-2] Micro fabrication using X-ray lithography in NewSUBARU

〇Sho Amano¹, Taki Watanabe¹, SInya Izawa¹, Kohzo Tamada¹, Tohru Yamasaki¹, Akinobu Yamaguchi¹, Yuichi Utsumi¹ (1.Univ. of Hyogo)

Keywords:X-ray lithography

We repot recent three activities for X-ray lithography in “New SUBARU” facility, which electron energy is 1-1.5GeV. We successfully fabricated 1) the filters for nebulizer, 2) the dihedral corner reflector arrays (DCRA) for floating image and 3) the micro-gears/micro-turbines with excellent mechanical properties.