9:30 AM - 11:30 AM
▲ [17a-PA05-5] Optimization of 2-step deposition process of i-a-Si:H passivation layer deposited by facing target sputtering
Keywords:amorphous silicon, surface passivation, sputtering
Poster presentation
16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells
Fri. Mar 17, 2023 9:30 AM - 11:30 AM PA05 (Poster)
9:30 AM - 11:30 AM
Keywords:amorphous silicon, surface passivation, sputtering