[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-18] Fabrication of ITO thin films for fuel cell separator

〇(B)Taisei Hattori¹, Takashi Tanaka², Eiji Kikuchi^3,4, Tomoki Otsuka¹, Tsutomu Araki¹, Kentaro Kaneko³ (1.Col. of Sci. & Eng. Ritsumeikan Univ., 2.EYETEC Co., 3.Res. Org. Sci. & Tech, 4.Kyoto Univ.)

Keywords:Fuel cell separator, Corrosion resistant film, Conductive film

In a fuel cell, both the cathode and anode are in a high-temperature corrosive environment, so the separator must have both high corrosion resistance and electrical conductivity. Therefore, we focused on ITO, which has excellent electrical conductivity, for separator membrane applications. Conventional production methods use methanol as the raw material solution, but for safety reasons, this research used hydrochloric acid and acetic acid solvents for synthesis. In addition, to reduce the ratio of In, which is a rare metal, we evaluated the conductivity of ITO films produced with a lower In composition ratio than that of conventional ITO films.